Abstract
An extreme high vacuum (XHV) pumping system has been produced with a chamber made of 0.2 % beryllium copper alloy. The system is evacuated by using a newly developed pill-type nonevaporable getters (NEG) combined with an entrapment pump. It is also equipped with our original ion gauge and low outgassing residual gas analyzer compatible with XHV. When you use this XHV pumping system, pressures in the 10−10 Pa range can be achieved within 24 hours from the atmospheric pressure.
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