Abstract
In recent years, high-precision and high-resolution encoders are expected for nanotechnology control systems. High-precision angle calibration devices are required and hence, they have been developed according to industry expectations. The accuracy of the disk and angle sensor was calibrated with high precision using the same accuracy measurement system, and a high-precision angle sensor was achieved. Using the high-precision angle calibration system, the encoder was realized with a high level of wide accuracy of 0.2 second. In addition, a high-resolution angle sensor with 30 bits was created, and the multifunctional angle sensor which has acceleration data and bus communications for a servo system was developed. The principle by which an angle sensor calibrates the accuracy by itself has been developed. The base technology for applying an angle sensor to a nanotechnology system was established. © 2007 Wiley Periodicals, Inc. Electr Eng Jpn, 162(3): 68–77, 2008; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/eej.20650
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