Abstract
磁控溅射成膜温度对纯铝薄膜小丘生长以及薄膜晶体管阵列工艺良率的影响
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https://doi.org/10.3788/yjyxs20142904.0548
Copy DOIPublication Date: Jan 1, 2014 | |
Citations: 2 |
磁控溅射成膜温度对纯铝薄膜小丘生长以及薄膜晶体管阵列工艺良率的影响
Join us for a 30 min session where you can share your feedback and ask us any queries you have