Abstract
The lightweight structure of a mirror in the Fast-steering Mirror(FSM) System was designed.Due to the high specific stiffness and low thermal deformation rate,SiC was used as a raw material to prepare the mirror.The lightweight mirror with a notched structure was supported by three points on the back.Several lightweight structures were analyzed by finite element method.The results show that the rigid of mirror increases with the width of rib.When the rib is wide enough,the rigid of mirror increases slightly.The stress and deformation of mirror caused by gravity increases with mirror thickness.Structure parameters of 4 mm rid and 4 mm mirror thickness are confirmed considering current mechanical manufacture process.The lightweight rate of mirror is 55%.The RMS value of mirror measured by Zygo interferometer is less than λ/30,which is in agreement with that of the analysis.
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