Abstract

Silicon nitride (Si3N4), a kind of non-oxide ceramics, has excellent properties for high temperature application and resistance of wears and corrosion, and is expected as a high temperature material. Reactive plasma spraying process, in which metal element reacts with surrounding active species in plasma, is useful for the spraying of non-oxide ceramics. In this research, Si/Si3N4 coating was fabricated by reactive radio frequency (RF) plasma spraying with graphite substrate. Si3N4 content in the coatings increased with N2 gas flow rate. Vickers hardness of the coatings increased with Si3N4 content in Si/Si3N4 coatings. The maximum content of Si3N4 was 53 wt% its hardness was 1272 Hv.

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