Abstract
Amorphous lithium phosphorus oxynitride (LiPON) thin films were deposited on SUS plates from a Li3PO4 target using RF magnetron sputtering with induction gas having various N2 concentrations. The ionic conductivity of the amorphous LiPON films was approximately 7.6×10－6 S･cm－1 at 75% N2 concentration, at which both doubly and triply phosphorus-coordinated nitrogen units would be linked to the Li3PO4 structure.
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