Abstract
Noble gas ion scattering is applied to surface analysis of a stainless steel (SS) sample. The scattering experiments have been carried out in UHV system with a sputter ion pump and a Ti sublimation pump. In the scattering spectra, two predominant signals are observed. These are due to scattered ion current from oxygen atom on the SS surface and the composition atoms (such as Cr, Fe, Ni) of SS. The sorption dependency by oxygen atom and the primary ion energy dependency of the relative signal ratio are discussed by comparing with the experimental results (He+ → O/Ni) reported by E. Taglauer and W. Heiland [1]. Shadowing effect is observed for oxygen over 0.7 Langmuir. It is concluded that, from the obtained energy spectra for the SS sample under various cleaning conditions, surface concentration of oxygen atom distributes from 0.1 to several Langmuir.
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