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Open Accesshttps://doi.org/10.3131/jvsj2.58.79
Copy DOI Journal: SHINKU |  Publication Date: Jan 1, 2015 |
 License type: free |
Affiliation: Tokyo Electron (Japan), Kyushu Universityガスフロー蒸着法による高純度有機薄膜の大面積成膜技術
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