Abstract
In ordinary activated reactive evaporations (ARE), the normal discharge is used for the activation of the reacting species. The results of ion-plating under the abnormal discharge of probe current has been investigated. A pressure of less than 0.01Pa was necessary for an electron-beam gun to evaporate titanium metal, but a relatively high pressure(-1Pa)was required to obtain glow discharge around the substrate: The pressure required for glow discharge, however could be lowered to-0.1 Pa by enhanced ions generated during the abnormal discharge. Concequently, ion-plating can be performed under relatively low pressures. The characteristics of coatings of TiN on SKH-4 were evaluated by the continuous cutting test, which showed a longer life for coated than for uncoated materials
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