Abstract
This paper describes a 3-axes angle sensor based on laser autocollimation for simultaneous measurement of small tilt angles about X, Y and Z-axes. The sensor consists of a laser diode as the light source and quadrant photodiodes (QPDs) as the optical position-sensing device. Differing from a conventional 2-axis autocollimator, the sensor uses a diffractive grating as the target mirror. It is verified that the sensitivity of the sensor in the θx (rolling) direction is determined by the pitch of the diffractive grating and the diameter of the laser beam. The sensitivities in the θy (pitching) and the θz (yawing) direction are determined by the wavelength and the beam diameter of the laser beam. It is confirmed that the resolution of θx is about 0.2 arc-seconds, and those of θy and θz are about 0.02 arc-seconds. Optical design and experimental results are presented.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of the Japan Society for Precision Engineering
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
