Abstract
The use of silicon nitride(SiNx) in the field of touch sensor has been investigated.Silicon Nitride(SiNx) with different thickness is deposited on the surface of bare glass by plasma-enhanced chemical vapor deposition technology.Using theoretical analysis and experimental test method,this article illuminates the impact on the touch sensor of transmittance and macro-color caused by film thickness and the refractive index.The results show that the refractive index of SiNx has great impact on the average transmittance,while the film thickness has no obvious effect on it.The film thickness has great impact on transmittance at fixed-wavelength and the macro-color,and it is crucial to the process control.
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