大口径标准球面镜组研制与应用

Abstract

In order to realize testing of a large aperture convex sphere, large aperture standard transmission spheres are designed and manufactured. The system focal length of 4400 mm, 350 mm aperture are required. The design and performance comparison, surface quality and radius of curvature testing, large aperture SiC convex sphere surface testing are complished. The simulation result analysis of optical design software shows that the wavefront performance of the system design is 0.0001 [peak to valley (PV), =632.8 nm], and it can offer a high-quality spherical wave and the reference spherical surface quality is up to 0.088 (PV, =632.8 nm), 0.006 [root mean square (RMS), =632.8 nm]. For a SiC convex sphere of 320 mm aperture and 4092 mm radius of curvature the manufactured results of the surface quality are up to 0.102 (PV, =632.8 nm), 0.011 (RMS, =632.8 nm). The results indicates that the large aperture standard transmission spheres are helpful for the testing large aperture convex sphere surface with large radius of curvature, the highly precision testing is complished only by standard sphere and non-null testing method based on digital mask, and the problems of large-aperture convex asphere or freeform mirror testing are solved.