Abstract
Motion accuracy of the feed table of the machine tools is very important, since it affects machining accuracy significantly. The water driven stage was developed as a feed table of ultra-precision machine tools. From the experimental investigations, pitching error of the water driven stage was measured to be 1.0×10-3 degrees. In addition, vertical displacement that is perpendicular to the feed motion was also measured to be 1.1 μm. In the previous studies, the pitching and vertical displacement control system has been presented. Then the effectiveness of the control system has been presented. As a result, the control system effectively controls both the pitching and vertical displacement. However, the pitching and vertical displacement control has not been investigated during feed motion of the table. Thus, this study deals with design of the pitching and vertical displacement control system with the measurement of vertical displacement of the table for designing feedback loop. In order to measure the vertical displacement of the center of gravity of the feed table, compensation technique that removes the influence of the pitching error of the table on the measurement is needed and proposed. The performance of the designed control system is verified via experiments. It is verified that the developed control system can effectively control the pitching and vertical displacement of the table during feed motion. In particular, the influence of external torque during feed motion on the pitching and vertical displacement errors is reduced effectively by the developed control system.
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More From: The Proceedings of Conference of Hokuriku-Shinetsu Branch
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