Abstract
イオンプレーティング法による窒化アルミニウム薄膜の作製
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https://doi.org/10.3131/jvsj.47.452
Journal: SHINKU | Publication Date: Jan 1, 2004 |
License type: free |
イオンプレーティング法による窒化アルミニウム薄膜の作製
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