Abstract
A new type of atomic force microscope (AFM) is described, in which an optical angular sensor detects the deflected angle of a cantilever instead of the deflected displacement, and the cantilever is able to be driven by a piezo actuator directly in accordance with the profile of surface. The developed AFM has advantages that it is sensitive, compact in size, and well suited for roughness measurement of big workpieces with high scanning speed, large scanning area and small interference among three axes. It has a vertical resolution of better than 1 nm and has been successfully used to obtain several stable images of machined surfaces. The results by our AFM are compared with those by SEM and STM, and the importance of making comparisons between results by different measuring principles has been confirmed.
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