Abstract
本文给出纳米多晶硅薄膜压力传感器，由方形硅膜和四个纳米多晶硅薄膜电阻构成惠斯通电桥结构组成，采用MEMS技术在 硅片实现传感器芯片制作。当工作电压VDD = 5.0 V时，传感器灵敏度为0.15 mV/kPa，准确度为0.39 %F.S.，可实现轮胎胎压测量。根据胎压传感器特性和NRF24L01无线通信技术，实现胎压监测系统设计。通过无线模块实现实时数据传输，该系统可实现对轮胎胎压的实时监测，保证车辆安全。 This paper presents the nano-polysilicon thin film pressure sensor, which consists of four nano- polysilicon thin film resistances fabricated on the silicon membrane of C-type silicon cup, and the resistances make up the Wheatstone bridge structure. The chip of sensor is fabricated by micro electromechanical system (MEMS) technology on a silicon wafer. When supply voltage VDD = 5.0 V, the sensitivity is 0.15 mV/kPa, and the accuracy is 0.39 %F.S.; tire pressure measurement can be realized. According to the characteristics of tire pressure sensors and the NRF24L01 wireless communication technology, the Tire Pressure Monitoring System (TPMS) is designed. By transmitting data timely through the wireless module, this system can realize the wireless and real-time monitoring, so as to ensure the safety of the vehicle.
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