Abstract
A simple technique for micromachining and its application to the fabrication of Nb based superconducting bridges are described. The technique is based on the use of oblique deposition of SiO film for the mask of anodization. By this technique variable thickness bridges with the length of about 0.1 to 1 μm have been successfully fabricated. Superconducting properties of a bridge with the length of about 0.3 μm are descrived. Zero voltage current is obserbed up to 7.2 K which is about 3 K above the critical temperature of thinned region of Nb film. Microwave induced steps on the V-I curve are also observed. The technique described in this paper is found to be suitable for the fabrication of variable thickness bridge type Josephson junctions.
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