Abstract
A surface oxidation layer of amorphous Co-Zr-Mo bias film was applied to a 10Å magnetic separation film in a trilayered MR element. Because the surface oxidation layer was thinner than the sputtered film, the bias field saturated at a smaller sense current and the saturation bias field became larger. This paper discusses the state of the surface oxidation. the application of a surface oxidation method to a crystal bias film, and the effect of the process temperature. Oxygen is located at an interatomic position without forming oxide, and a high-density-oxygen area in the bias film becomes nonmagnetism. The surface oxidation method can be applied to both amorphous and crystal bias films. A study of the effect of heat showed that the trilayered MR element is stable at process temperatures up to 240°C.
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