Abstract
A microwave launcher with a ring slot has been designed, allowing a UHV viewing port to be utilized as a dielectric material in order to induce high-density plasma with the surface wave mode in a UHV compatible chamber. Electrostatic probe measurements on the plasma show that the plasma density distribution results from an intensive ionization rate in the vicinity of the dielectric/plasma interface and from the ambipolar diffusion. When nitrogen is mixed to argon gas, the plasma density remains almost constant as a result of the descrete surface mode, whereas the atomic nitrogen density varies in proportion to the nitrogen partial pressure.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
