光学自由曲面研抛机床的综合误差建模与补偿

Abstract

To improve the machining accuracy of an optical free-form surface,an integrated error model for five-axis polishing machine tool was established based on multi-body system theory.The movement error and rotation error of every axis were measured and analyzed by direct and repetitive measurement model,and it shows that the feed speed and measurement spacing have no significant influence on the movement and rotation errors.By taking the error data into the integrated error model,the variation rule of movement and rotation errors which are the components in the three axes of x,yand zfrom the integrated error of polishing machine tool was obtained.According to the above analysis,the main influence factor of integrated error is linear displacement errors.The compensation experiment was conducted based on integrated error model.The linear displacement errors of the three axes of x,yand z have been compensated obviously and they are decreased by 88%,89% and84%respectively.The experiment results indicate that the integrated error model and compensationmethod have high accuracy and excellent robustness.