Abstract
The non-paraxial diffraction theory was used to analyze the wavefront of deep ultra-violet illuminating system in this paper.Based on the theory,the reference wave-fronts which were diffracted from the standard and practical apertures were calculated.The results turned out that the irregular degree of an aperture had a great impact on the P-V value.If the irregular degree of the aperture was limited to 0.02,the P-V value of the wave-front could be controlled below 1.5% wave length,the system could satisfy the practical application.Meanwhile,the results also showed that the irregular degree of aperture was not a big factor for intense uniformity,and it could be enhanced by decreasing the NA value of the wavefront.
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