Abstract
In general, a hydraulic proportional valve has a large body because of their complicated structures using solenoids or motors. Therefore, it is difficult to realize lightweight hydraulic systems. The purpose of this research is to develop a small hydraulic flow control valve to control hydraulic actuators for a small hydraulic actuator system. In this paper, a McKibben artificial muscle has been controlled by small flow control valves. These valves can control the flow rate using particles excited by piezoelectric vibrators. Thus, the speed of the artificial muscle has been successfully controlled by the fabricated flow control valves.
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