紫外衍射微透镜阵列的设计与制备

Abstract

In order to enhance fill factor of ultraviolet staring focal plane array and improve its detection efficiency,it can be completed by the integration between diffractive microlens and ultraviolet focal plane array.Diffractive microlens arrays are designed using scalar diffraction theory for 128×128 solar-blind ultraviolet focal plane array.The working center wavelength is 350nm,the single lens F number is F/3.56.The microlens arrays are fabricated by combination multi-coating and stripping technique.The practical processes and fabrication errors are discussed,and the optical characteristics of 128×128 diffractive microlens arrays are measured.Experimental results show that the diffraction efficiency of the diffractive microlens array is 88% with a little deviation from the theoretical value 95%.The fabrication errors are from the alignment error and the line width error.Based on their uniform optical intensity distribution,the monolithic integration between diffractive microlens and ultraviolet focal plane array can improve the ultraviolet staring focal plane array device performance.