Abstract
We introduce a silicon single crystal wafer holder with a cold trap and a direct current heating mechanism mounted on a conflat flange with an outer diameter of 70 mm. It consists of 300-ml cold trap, tantalum electrodes for direct-current heating and commercial electrical feedthroughs. A silicon single crystal with a size of 30×5×0.5 mm can be heated to >1100 °C by direct heating, and can be cooled down to <100 K with liquid nitrogen.
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