Abstract
In order to research the data processing of the off-axis aspheric surface measurement by coordinate contour measuring machine(CMM),the principle of the off-axis aspheric surface measurement by the CMM is introduced,the detailed analysis of the errors except the instrument itself errors is given,the off-axis aspheric surface data processing model for these error corrections is built on this basis.Matlab and C language are mixed programming in the model.After data simulation the actual off-axis aspheric surfaces are measured.In the data simulation,the surface error PV value is less than 0.001μm.For a practical application,the surface error PV value of an actual off-axis aspheric surface is about 0.245μm,and using the data processing model it can reach 1.2μm,close to the instrument itself measurement precision.The result indicates that the established model and the data processing software are correct.
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