酸性硫酸銅電解液から電析した銅膜の結晶配向性に及ぼすアセトニトリルの効果

Abstract

Crystal orientations of copper film electrodeposited from the acid copper sulfate electrolyte in the presence of acetonitrile were investigated by X-ray diffraction pattern. It was found that the main crystal orientation of the electrodeposited copper film was the 111 plane and that the orientation varied depending on the acetonitrile concentration, the current density, the bath temperature and the cuprous ion concentration. It was considered that the preferred crystal orientation originated from selective adsorption of acetonitrile on the 111 plane.