Abstract

A method for preparing Permalloy films electro deposited with a square pulse mode current was studied along with the soft magnetic properties of the films. The influence of three plating parameters (duty cycle ratio, frequency, and dc-bias) on the formation of film structures, alloy composition, and magnetic properties was investigated. It was found that films with μi≥4000 (max. 6000) and zero magnetostriction can be obtained with good reproducibility by pulse plating with a low duty cycle ratio. The characteristics of Permalloy electrodeposition with a square pulse current are discussed.

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