トランスファプリントを応用した微小機械要素作製に関する研究

Abstract

This present study proposes a process to fabricate micro/nano-mechanical structure for MEMS application using transfer-print. Au thin-film is transferred from a h-PDMS stamp to a micro-structured SU-8 substrate, which have an array of 50-μm-width micro-ridges and micro-grooves. The transferred Au thin-film, of which the thickness is less than 100nm, is formed into the micro-beam across the micro-ridges of substrate. The deposition process of thin-film and the surface morphology of h-PDMS stamp are also investigated to clarify appropriate surface properties for transfer print. Vapor-deposited Au thin-film can be easily released from the hydrophobic stamp. Multi-layered thin-films of Au/Ni/Cu and Au/Al/Cu are prepared on the stamp and also processed on the micro-structured substrate by transfer-print. The transferred multi-layer thin-films are also formed into an array of micro-beams with 100nm thickness. Their production yield and from accuracy can be improved due to modified surface and mechanical strength of multi-layered thin-film as compared with that of monolayer thin-film.