Abstract
Factors which have influences on the deformation of the water jet cooled mirror were analyzed. Numerical simulations of corresponding structural parameters were then made to explore general design laws of the water jet cooled mirror and an optimized scheme was achieved. The results show that, the maximum mirror surface deformation can be reduced to 0.07 μm under the conditions of 100 W net absorption power and 25 mm spot diameter, when the water jet cooled mirror is 80 mm in diameter with silicon as mirror material.
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