基于背景校正和图像分割定量分析光学元件表面疵病的新算法

Abstract

A hybrid iterative algorithm which combines the transport of intensity equation (TIE)with the iterative angular spectrum propagation algorithm is studied.In the simulations and experiments,the phase retrieval performances by the TIE algorithm and the hybrid iterative algorithm at different defocusing distances are compared. The results indicate that,if compared with those by the TIE algorithm,the accuracy at large defocusing distance and spatial resolution of the phase retrieval by the hybrid iterative algorithm are improved.This algorithm provides a solution to the phase retrieval with high accuracy.