Abstract
This report describes the crystal structure of and heat-induced structural changes in electroless palladium plating films deposited from an ethylenediamine complex bath using trimethylamine borane as a reducing agent. The boron content of the films and their crystallinity were proportional to the concentration of trimethylamine borane in the bath. X-ray diffraction data showed a diffused pattern, in as-plated films (before heat-treatment), which changed into the sharp crystalline features of PdH0.706 at 400°C, and the sharp crystalline features of the Pd phase after heat-treatment at 600°C. The diffraction angle of the Pd phase shifted to a slightly lower angle following an increase in boron content.
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