Abstract
The influence of polarization direction orthogonality on Polarization Phase Shifting Interferometry(PPSI)was analyzed to improve its measurement precision.Based on the analysis of PPSI principle,it points out that the measurement error is a function of Optical Path Difference(OPD)and the PV of measurement error is proportional to the non-orthogonality and the ratio of amplitudes of test beam to reference beam.The polarization non-orthogonality can be introduced by the reflection or refraction on a surface.Then several approaches were recommended to depress the non-orthogonality,such as proper coatings,incident angles and polarization directions.A configuration of Skip-Flat test with incident angle of 45°was set up.It shows that the distribution of measurement error is coincident with that of OPD.Moreover,the measurement error is 0.174 1λ(PV),which is in agreement with that of the theoretical analysis.Finally,the paper suggests that it is necessary to analyze individually each of the component under the test for making sure the measurement precision.
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