Abstract
Recently, many micromachines have been studied in a wide range of industries. The micromachines are expected various tasks in narrow places where people cannot enter. These tasks require robot arms composed of small links. We built a small ultrasonic motor having high torque and simple structure for the link mechanism. A preload generation mechanism is essential for improving the torque and the stability of the ultrasonic motors. In this study, we propose a micro preload mechanism using a restoring force of springs. The maximum torque of the ultrasonic motor with the preload mechanism is 4 times larger than that of the same motor with no-preload.
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