Abstract
Thin-film orthogonal fluxgate magnetic sensors with dimensions of 4 mm × 1.2 mm were febricated by using micro-plating technology. Electro-plated 4-μm-thick NiFe films were utilized as the core material, and 100-turn Cu coils were wound around the magnetic core as sensing coils. The greatest magnetic sensitivity was obtained when weak magnetic anisotropy was induced with its easy axis in the transverse direction of the magnetic core. The low-field sensitivity also showed a strong dependence on the core width due to the shape magnetic anisotropy, and became maximum for a width of 100 μm. The optimized sensor elements were used to investigate the output characteristics with a negative feedback loop for the terrestrial magnetic flux, and a magnetic sensitivity of 16500 V/T was obtained. The output linearity to the external field was 1.4%, and showed an offset of 50mv.
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