Abstract
Generally, XYΓ positioning device is fabricated by piling up X, Y and Γ table separately, however this construction makes the positioning device complicated and not compact. This paper describes a new method of XYΓ positioning device consists of four piezo elements with a weight and a center slider. Through controlling the deformation of piezoelectric actuators, step displacement in any directions can be achieved by using friction force and generated inertial force. This device has simple and compact structure. There is also no limitation of the traverse length with fine resolution in any directions. The motion in XYΓ directions was demonstrated through application of controlled voltage waveforms. Minimum step sizes were obtained of 0.05 μm in either X and Y directions and 0.65'' in Γ direction. The XYΓ motion can be controlled by adjusting applied voltage waveforms of four actuators. As the result, motion errors decreased from 1.0 μm to 0.03 μm in shift and from 20'' to 0.62'' in yaw with 25 μm traverse length in X direction. The positioning device moved in desired direction by step displacement in X and Y displacement were repeated sequentially.
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