衍射光栅机械刻划成槽的预控试验

Abstract

As the mechanical scratching of diffraction gratings still depends on the experiences of operators,it gives poor grooved quality and can not be pre-controlled.This paper proposes a diffraction grating production method: film classification test engraving method based on an aluminum thin film deposition process status quo,and reveals the microstructure and mechanical properties of different thin film samples based on X-ray Diffraction(XRD),Scanning Electron Microscope(SEM) and nanoindentation experiments.The study results show that the grating ruling can be approximately equivalent to a wedge under the pressure of the process,so that the slip-line field can be used to obtain the solution analytically and carve the slot on time trial for the low elastic modulus class film.Moreover,the finite element simulation can be used to pre-control the slot for elastoplastic class.The method can implement the pre-classification of the films,and can determine the tool processing parameters for different types of films with different methods.Futhermore,a near-perfect trough is scratched.Experiments show that the time-consuming and pre-engraving test times are reduced and the graving quality and efficiency are improved.The method lays the foundation for improving the characteristics of more sophisticated gratings.