Abstract
Magneto-optic and magnetic properties on compositionally modulated TbCo films were studied. Films were prepared on glass substrates using RF sputtering method by modulating substrate bias voltage with a sequence of -200 V/0 V/....../0 V or -250 V/0 V/....../0 V. Single layered films of 0 V have high perpendicular magnetic anisotropy (Ku), small Kerr rotation angle (θK) and good chemical stability, while high biased films have low Ku large θK and poor chemical stability. The period of modulation was changed to between 1500A and 40 A and was confirmed by Rutherford backscattering spectrometry and X-ray small angle scattering method. The modulated films showed higher Ku and resistivity to oxidation. High θK and high reflectivity can be obtained at glass side by this multi-layered structure.
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