Abstract
Recently, the need has increasingly been felt for a non-destructive, rapid and precise method of testing, which can be used to measure the thickness of functional film. Use of the microscope and eddy-current instrument recommended by JIS H8680, however, produces unsatisfactory test results for thicknesses below 2μm.Thickness of anodic oxide films and chromate coatings was therefore measured using interference fringes obtained by spectrophotometer, and the results obtained were compared with those obtained by microscope and TEM in terms of precision and measurement limits. The thickness test results obtained for sulfuric film and chromate coating using the spectrophotometer were good, with mimits for the thickness test of 0.14μm on sulfuric film (n=1.6) and 0.11μm on chromate coating (n=2.0) at wavelengths from 200 to 2500nm, where n is the refractive index.
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