Abstract
This paper describes measurement of in-plane vibration using a laser speckle interferometer with double-aperture method. A new optical system, which transforms interference fringes in a speckle into a line image on a CCD linear image sensor with an additional cylindrical lens, was proposed. From an experiment to measure static displacement, it was revealed that the cylindrical lens acted to detect fringes two-dimensionally and to average the distribution of optical intensity as same as.scanning measurement and that the measuring accuracy could be improved by decreasing the influence of phase variation in the fringes. The interferometer was applied to measure the flexural vibration of a cantilever as an example, and the vibration displacement could be measured with 1.95kHz of sampling frequency and with 0.5μm of measuring error.
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