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Abstract
The dynamic measurement of nanometer-order displacements was realized by using our heterodyne laser interferometry method. The measuring system of the existing method contains two analog devices, namely, a frequency divider and a phase meter, and various electrical and electronic noises are apt to be picked up by them. In addition the frequency divider has a minimum limit of 1/32 and troublesome manual operation is needed in the range exchange. To avoid the above inconveniences, we replaced the analog devices with a digital method using a special software package. The improvement was successful and the measurable frequency range was expanded to 300 Hz and above.
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