Abstract
Dust behaviors and Coulomb-crystal structures in a plasma have been analyzed in a parallel-plate rf discharge reactor. The size of growing fine particles, which were being coated with hydrogenated amorphous carbon films on the seeds of ultra-fine carbon particles in a methane plasma, were determined by Mie-scattering ellipsometry. Forces on particles have been evaluated and the change of the particle distribution between electrodes is explained from the force balance. Coulomb crystals were observed to change their structures from 3-dimensional to 2-dimensional with the growth of particles. The calculation of Coulomb potential energy indicates that particles in the 3-dimensional Coulomb crystal are coupled in planes parallel to electrodes more strongly than in the vertical direction. Larger particles, however, mutually interact by an attractive force in the vertical direction.
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