Abstract

A new ceramic coating technique was developed using high power CO2 laser (1001000 W) as an evaporating heat source. Coating experiment of various oxide and nitride ceramics onto metal substrates revealed that homogeneous hard films of amorphous structure could be prepared with high deposition rates (for example, in the case of mullite film, 0.6, μm/min at 320 W). It should be noticed that BN film formed by the laser deposition with the source of soft hBN ceramics showed very high hardness over Hk4000 kg/mm2. By simultanious irradiation of N ions generated through Kaufman type ion source nearly stoichiometric boron nitride films, can be formed which are considered to have a cubic structure.

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