Abstract
As the nonlinearity between the Axial Chromatic Aberration(ACA)and the wavelength of a dispersive objective would lower the overall performance of a chromatic confocal microscope,the dependence of the ACA of an optical system on the lens assembly was studied and the transfer principle of ACA was derived.Based on ACA transfer principle,a dispersive objective configured with a negative and a positive lens groups was proposed,in which both the negative and positive lens groups could generate the linear ACA with specified focal power distribution.Optimized result indicates that the dispersive objective based on the proposed configuration has small longitudinal aberration,a large ACA,and a long working distance.The ACA of dispersive objective is 1mm in 430-710nm.The relative nonlinearity of ACA is about 4.6% and the deviation of sensitivity is less than 1/3 that of a whole,superior to traditional ones.With designed dispersive objective,the chromatic confocal microscope can achieve an axial resolution of 0.3μm and a lateral resolution of 5μm,which satisfies the requirements of precise measurement.
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