Abstract
NiZn-ferrite thin films were prepared by the laser ablation method. The laser ablation apparatus used in this study can irradiate a thin-film surface with a laser beam during the preparation of a film. The magnetic properties and crystal structure of NiZn-ferrite thin films were fairly strongly affected by the oxidation reaction during film preparation. Factors related to the oxidation reaction are the pressure of the oxidation gas, the fiuence of the laser beam irradiating the thin film surface, and the temperature and atmosphere of annealing. Annealing of NiZn-ferrite thin films was effective in forming of a spinel structure in the films. Suitable conditions for film formation and annealing were investigated in order to obtain a coercive force of 1.4 Oe.
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