Abstract
We made magnetostrietive actuators and electromagnetic actuators by using various kinds of magnetic thin film. The magnetostrictive actuators were bimorph cantilever actuators and a traveling machine, composed of magnetostrictive amorphous Tb-Fe and Sm-Fe thin films on a polyirmide substrate. The 3-mm-long cantilever actuator using a 3-μm-thick substrate exhibited large deflection above 100μm in magnetic fields as low as 24 kA/m, and above 500 μm at a resonant frequency of 29 Hz in an alternating magnetic field of 24 kA/m. The electromagnetic actuators are driven by magnetic torque, which made “flying” actuation possible. These magnetic actuators need no power supply cables, because they are driven by an external magnetic field.
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