Abstract

We proposed the cold cathode made of carbon nanotubes (CNTs) for an ionization gauge. The CNTs were grown radially on a Ni wire by DC-plasma chemical vapor deposition (CVD). The radial growth of CNTs was obtained by controlling deposition temperature, C2H2: NH3 ratio and pressure. Pre-heating of the Ni wire in vacuum prior to CVD process resulted in the higher density of CNTs. The field emission characteristics of two types of CNT cathodes were examined.

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