イオンミリング法を用いた垂直記録用単磁極ヘッドの作製

Abstract

Investigation of the processes conventionally used for fabricating perpendicular recording heads indicated that using a trapezoidal main pole for single-pole heads would solve the side write/erase problem between adjacent tracks. We developed a process that uses ion milling and an alumina hard mask for sputtering, and we used the process to fabricate a narrow (120-nm wide) trapezoidal main pole. The beveled angles of the pole depended on both throat height and angle at the flare point. When the angle was 90°, the beveled angles of the trapezoid were about 10°. Evaluation data confirmed that perpendicular recording heads with a trapezoidal main pole solved the side write/erase problem.