装置周辺の空気の流れの可制御性とその制御法の一提案

Abstract

Air fluctuation around the fine equipment system seems to be a kind of extremely low velocity air flow and is one of the major causes in deteriorating system working accuracies. Unfortunately there is no active means to control air fluctuation at present. This paper describes the controllability of air flow around the equipment assuming that the air flow dynamics is approximated by a linear equation under the low velocity viscous flow condition. With the verification of its controllability, several experiments are performed to confirm the possibility of air flow control by using smoke particles. Specifically, smoke particles are stimulated by the optical radiation pressure of Ar laser beam. Their behaviors are regulated by the optical system such as a convex lens and an ND filter with the number of stimulated smoke particles. The experimental results basically show the possibility of air flow control using an optical radiation pressure.