Abstract
An X-ray diffractometer newly designed for thin film analyses is consisted of a compact X-ray generator with high loaded power rate to a small focus, a curved position sensitive detector and K-axis type 4-circle goniometer. The diffractometer enables measurements of thin film samples for electronic devices, e.g. rapid pole figure measurements of thin film samples and depth-sensitive measurements of multilayer thin films. A preffered orientation analysis of Co-Nb-Zr films for VTR core and a crystallinity analysis of multilayer films for circuit board were performed by using this apparatus.
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