Abstract

Unlike conventional crystallography techniques, diffractive imaging becomes possible to analyze the specimen structure of non-crystalline materials. Combined low-energy electron beam with diffractive imaging, low-damage imaging technique has been developed for the analysis of light element material that is susceptible to damage due to beam. Here, it is described with respect to results of verification of low-energy electron diffractive imaging and atomic resolution imaging with carbon nanotubes as specimens. Furthermore, features of electron diffractive imaging in comparison with X-ray and our approach and efforts to date are described in this article.

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